JPH0162359U - - Google Patents
Info
- Publication number
- JPH0162359U JPH0162359U JP15635087U JP15635087U JPH0162359U JP H0162359 U JPH0162359 U JP H0162359U JP 15635087 U JP15635087 U JP 15635087U JP 15635087 U JP15635087 U JP 15635087U JP H0162359 U JPH0162359 U JP H0162359U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- electrode
- wafer
- heating
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 11
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000009832 plasma treatment Methods 0.000 claims 2
- 239000012530 fluid Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15635087U JPH0162359U (en]) | 1987-10-13 | 1987-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15635087U JPH0162359U (en]) | 1987-10-13 | 1987-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0162359U true JPH0162359U (en]) | 1989-04-20 |
Family
ID=31434814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15635087U Pending JPH0162359U (en]) | 1987-10-13 | 1987-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0162359U (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS559948A (en) * | 1978-07-07 | 1980-01-24 | Fuji Sash Kogyo Kk | Vertically mobile window |
| JPS5753939A (ja) * | 1980-09-17 | 1982-03-31 | Matsushita Electric Ind Co Ltd | Hakumakunodoraietsuchinguhoho |
-
1987
- 1987-10-13 JP JP15635087U patent/JPH0162359U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS559948A (en) * | 1978-07-07 | 1980-01-24 | Fuji Sash Kogyo Kk | Vertically mobile window |
| JPS5753939A (ja) * | 1980-09-17 | 1982-03-31 | Matsushita Electric Ind Co Ltd | Hakumakunodoraietsuchinguhoho |
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